LC control no. | sh 85084822 |
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Topical heading | Microelectronics |
Variant(s) | Microminiature electronic equipment Microminiaturization (Electronics) |
See also | Electronics Microtechnology Semiconductors Miniature electronic equipment |
Found in | Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001: What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems) |