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Chemical vapor deposition

LC control 94001275
LC classificationTS695
Topical headingChemical vapor deposition
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Variant(s)CVD (Chemical vapor deposition)
Deposition, Chemical vapor
Vapor deposition, Chemical
See alsoVapor-plating
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Found inWork cat.: 93-230212: European Conference on Chemical Vapour Deposition ... c1989 (CVD)
ASTI (Chemical vapor deposition equipment: CVD processes)
Acad. press dict. sci. tech. (A technique for coating the surface of a solid by exposure to a vapor, usually a metal halide vapor, under pressure of ... while allowing the vapor to undergo thermal decomposition or hydrogen reduction.)
McGraw-Hill dict. sci. tech. (Growth of thin solid films on a crystaline substrate as the result of thermochemical vapor phase reactions (CVD))
Engr. index: v. 89, pt. VI, p. 1979 (Chemical vapor deposition (CVD))
LC database, 2/8/94 (Chemical vapor deposition; CVD)