| LC control no. | sh 94001275 |
|---|---|
| LC classification | TS695 |
| Topical heading | Chemical vapor deposition |
| Variant(s) | CVD (Chemical vapor deposition) Deposition, Chemical vapor Vapor deposition, Chemical |
| See also | Vapor-plating |
| Found in | Work cat.: 93-230212: European Conference on Chemical Vapour Deposition ... c1989 (CVD) ASTI (Chemical vapor deposition equipment: CVD processes) Acad. press dict. sci. tech. (A technique for coating the surface of a solid by exposure to a vapor, usually a metal halide vapor, under pressure of ... while allowing the vapor to undergo thermal decomposition or hydrogen reduction.) McGraw-Hill dict. sci. tech. (Growth of thin solid films on a crystaline substrate as the result of thermochemical vapor phase reactions (CVD)) Engr. index: v. 89, pt. VI, p. 1979 (Chemical vapor deposition (CVD)) LC database, 2/8/94 (Chemical vapor deposition; CVD) |
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