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Microelectromechanical systems

LC control 97007351
LC classificationTK7875
Topical headingMicroelectromechanical systems
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Variant(s)MEMS (Microelectromechanical systems)
Micro-electro-mechanical systems
Microelectromechanical devices
Micromechanical devices
Micromechanical systems
See alsoElectromechanical devices
    Browse this term in  LC Authorities
    Browse this term in  LC Authorities
    Browse this term in  LC Authorities
Found inWork cat.: 96069475: Microelectronic structures and MEMS for optical processing II, 1996: p. 4 (Microelectromechanical systems) p. 12 (whether they are called Micro-Electro-Mechanical Systems (MEMS), micromechanical systems, micromachines, or MicroSystems Technology, these manufacturing based technologies are enabling the development and production of many new exciting products)
Eng. ind. (subject: Microelectromechanical devices)
BPI (subjects: Microelectromechanical systems; Micromachines)
ASTI on FirstSearch, Sept. 26, 1997 (subjects: Micromachines; Mechatronics; titles: Microelectromechanical systems; micro machinery, etc.)
INSPEC on FirstSearch (descriptor: Micromechanical devices; titles: microelectromechanical systems, etc.)
LC database, Sept. 26, 1997 (in titles: Micro electro mechanical systems; Microelectromechanical systems; micromachines; microelectromechanical devices)
Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001: What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems)
Not found inThe electronics handbook, 1996.