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Microelectromechanical systems

LC control no.sh 97007351
LC classificationTK7875
Topical headingMicroelectromechanical systems
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Variant(s)MEMS (Microelectromechanical systems)
Micro-electro-mechanical systems
Micro-machinery
Microelectromechanical devices
Micromachinery
Micromachines
Micromechanical devices
Micromechanical systems
See alsoElectromechanical devices
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Microtechnology
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Mechatronics
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Found inWork cat.: 96069475: Microelectronic structures and MEMS for optical processing II, 1996: p. 4 (Microelectromechanical systems) p. 12 (whether they are called Micro-Electro-Mechanical Systems (MEMS), micromechanical systems, micromachines, or MicroSystems Technology, these manufacturing based technologies are enabling the development and production of many new exciting products)
Eng. ind. (subject: Microelectromechanical devices)
BPI (subjects: Microelectromechanical systems; Micromachines)
ASTI on FirstSearch, Sept. 26, 1997 (subjects: Micromachines; Mechatronics; titles: Microelectromechanical systems; micro machinery, etc.)
INSPEC on FirstSearch (descriptor: Micromechanical devices; titles: microelectromechanical systems, etc.)
LC database, Sept. 26, 1997 (in titles: Micro electro mechanical systems; Microelectromechanical systems; micromachines; microelectromechanical devices)
Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001: What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems)
Not found inThe electronics handbook, 1996.